Parametric Optimization and Stiffness Determination of XY Positioning Stage for High Precision Applications

Abstract

In micro-electro-mechanical system (MEMS) flexural mechanisms are widely used because of their advantages such as frictionless and wear less motion and high precision. Flexures depend on material elasticity for their functionality. In flexure mechanism, motion is generated due to elastic deformation of the beam from which it is made. One of the typical advantages of flexural mechanism is to gain precise deformation and flexibility to obtain motion in desired direction. This paper deals with design, analysis and modeling of XY flexure mechanism which is based on double parallelogram flexure (DFM). The XY mechanism presented has monolithic structure and it is based on double parallelogram flexure. Finite element model and analysis is carried out in ANSYS 14.5. Static analysis is done to find out force-deflection characteristics of mechanism. Parametric analysis is used to optimize design parameters of flexure beam. Finite element analysis (FEA) result validates analytical results of mechanism. 

Cite this Article Mulik Sharad S, Krishnamoorthy A, Deshmukh Suhas P. Parametric Optimization and Stiffness Determination of XY Positioning Stage for High Precision Applications. Journal of Experimental & Applied Mechanics.2016; 7(2): 77–84p.