On-Wafer Calibration of Vector Network Analyzer – Fabrication of LRM Calibration Standard

作者

  • Nishtha Chopra

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Calibration##common.commaListSeparator## on-wafer##common.commaListSeparator## vector network analyzer##common.commaListSeparator## photomask##common.commaListSeparator## autocad##common.commaListSeparator## fabrication

摘要

Vector network analyzer or VNA has become ascendant of most measuring networks above 1 GHz. These networks consist of various manufacturing defects (due to resistance, capacitance and inductance) including VNA errors. To measure these errors, VNA was calibrated using a calibration kit. The usage of this calibration kit squanders a lot of time and money; moreover, the results are not accurate. To avoid this, the concept of on-wafer calibration is introduced, wherein calibration patterns are developed on a wafer and hence connected to specially designed RF probes to calibrate VNA. Keywords: Calibration, on-wafer, vector network analyzer, photomask, autocad, fabrication

作者簡介

  • Nishtha Chopra
    electrical and electronics engineering, graduate

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出版日期

2012-01-02

期號

卷 2 期 2 (2011)

分類

Review Articles

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