Fabrication of Micro/Nano-structures in Soda-Lime Glass by Single-beam Femtosecond Laser Writing

Abstract

In this paper, we demonstrate the formation of controllable periodic micro/nano-holes and horizontal periodic micro/nano-gratings on the surface of and inside soda-lime glass by irradiation with a single-beam femtosecond laser. These kinds of periodic micro/nano-structures are fabricated on the surface of and different layers inside soda-lime glass without damaging other layers. Suitable control over various irradiation conditions of the femtosecond laser beam, such as average pulse energy, scanning speed, scanning step of the horizontal lines, and position of focal point of the femtosecond laser beam allow us to control the dimensions and period of the micro/nano-holes and horizontal micro/nano-gratings. Furthermore, we briefly explain different aspects and application areas of the fabricated micro/nano-structures.

Keywords: Femtosecond laser, single beam direct laser writing technology, micro/nano-holes, micro/nano-gratings