Experimental Recording of the SU-8 Micropillars by Scanning Electron Microscope

Abstract

SU-8 micropillars are designed in the laboratory computer. The designed SU-8 micropillars are fabricated by the maskless lithography using standard SU-8 processing methods. The range in side length of square SU-8 micropillars is 100 micron to 350 micron. The range in diameter of circular SU-8 micropillars is 100 micron to 350 micron. The SEM images of these fabricated SU-8 micropillars are captured by different tilt angles to characterise these micropillars. These SU-8 micropillars can be fabricated inside the SU-8 based lab-on-a-chip systems for microfluidic applications.

Keywords: SU-8, micropillars, scanning electron microscope (SEM)

Cite this Article

Subhadeep Mukhopadhyay. Experimental Recording of the SU-8 Micropillars by Scanning Electron Microscope. Research & Reviews: A Journal of Biotechnology. 2017; 7(1): 29–32p.